Dedicated fixture design for polishing of silicon
Polishing of silicon is a major process seen in microelectronic and optical industries. As mirror-like surface finish is an essential factor that influences the performance of electronic and optical products, it has been believed that the fixture in finite element does play a role to produce such a...
| Main Author: | |
|---|---|
| Format: | Undergraduates Project Papers |
| Language: | English |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/300/ http://umpir.ump.edu.my/id/eprint/300/ http://umpir.ump.edu.my/id/eprint/300/1/Taufif_Zakaria.pdf |