Morphology, Topography and Thickness of Copper Oxide Thin Films Deposited using Magnetron Sputtering Technique
Cupric Oxide (CuO) is one of the p-type metal oxide semiconductors that are suitable for use in gas sensing device. The copper oxide thin film was prepared on silicon wafer by sputtering of pure copper target at difference deposition time of 5 min, 10 min and 15 min using RF magnetron sputtering tec...
| Main Authors: | , , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/6238/ http://umpir.ump.edu.my/id/eprint/6238/ http://umpir.ump.edu.my/id/eprint/6238/1/Morphology%2C_Topography_and_Thickness_of_Copper.pdf |